薄膜制备技术科技名词
薄膜制备技术科技名词：第1页
物理气相沉积
physical vapor deposition;PVD
蒸镀
evaporation deposition
真空蒸镀
vacuum evaporation deposition
蒸发
evaporation
电阻加热蒸发
resistance heating evaporation
高频感应加热蒸发
high frequency induction heating evaporation
电子束蒸发
electron beam evaporation
空心阴极电子枪
hollow cathode electron-gun
激光蒸发沉积
laser evaporation deposition
连续激光沉积
continuous laser decomposition
脉冲激光沉积
pulsed laser deposition
电弧蒸发
arc evaporation
直流电弧放电蒸发
direct current arc evaporation
电子轰击电弧放电蒸发
electron bombard
反应蒸镀
reactive evaporation deposition
闪蒸蒸镀
flash evaporation
双蒸发蒸镀
double source electron beam evaporation
溅射沉积
sputtering deposition
阴极沉积
cathodic deposition
磁控溅射
magnetron sputtering
非平衡磁控溅射
unbalanced magnetron sputtering
高频磁控溅射
high frequency magnetron sputtering
脉冲磁控溅射
pulsed magnetron sputtering
孪生靶磁控溅射
twin targets magnetron sputtering
射频溅射
radio frequency sputtering
反应溅射
reactive sputtering
离子束溅射
ion beam sputtering
离子镀
ion plating
离子辅助沉积
ion assisted deposition
直流二极型离子镀
direct current diode ion deposition
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薄膜制备技术 的上级学科
材料科学技术
材料科学技术基础
材料合成、制备与加工